@inproceedings{b3512cfba0a9466ea8defaeb778bc413,
title = "Fabrication and characterization of a Fabry-Perot-based chemical sensor",
abstract = "A micromachined silicon Fabry-Perot interferometric sensor is demonstrated as an optical chemical sensor. This sensor is based on the combined nature of the amplifying and tuning characteristics of the Fabry-Perot microcavity structure and the doping effect of polymer films such as Poly(3- dodecylthiophene) (P3DDT) upon exposure to an oxidizer, in this case, iodine. The fabricated Fabry-Perot chemical sensors show reversible sensing behavior with a maximum change in transmitted optical intensity of 60%. Significant improvement of the sensing performance is obtained from the Fabry-Perot microcavity structure compared to a simple planar single membrane structure, which indicates the resonant effect of the Fabry-Perot cavity on the chemical sensor. The measured sensing characteristics suggest that the change in absorptance of P3DDT polymer inside the microcavity plays a major role, while the deflection of a microcavity membrane by the P3DDT polymer-induced surface tension gives tunability of the sensor to maximize the amplification of output response by adjusting the Fabry- Perot microcavity gap spacing.",
author = "Jaeheon Han and Neikirk, {Dean P.} and Mervyn Clevenger and McDevitt, {John T.}",
year = "1996",
language = "English (US)",
isbn = "0819422797",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
pages = "171--178",
editor = "M.Edward Motamedi and Wayne Bailey",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Microelectronic Structures and MEMS for Optical Processing II ; Conference date: 14-10-1996 Through 15-10-1996",
}