Fabrication and characterization of a Fabry-Perot-based chemical sensor

Jaeheon Han, Dean P. Neikirk, Mervyn Clevenger, John T. McDevitt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A micromachined silicon Fabry-Perot interferometric sensor is demonstrated as an optical chemical sensor. This sensor is based on the combined nature of the amplifying and tuning characteristics of the Fabry-Perot microcavity structure and the doping effect of polymer films such as Poly(3- dodecylthiophene) (P3DDT) upon exposure to an oxidizer, in this case, iodine. The fabricated Fabry-Perot chemical sensors show reversible sensing behavior with a maximum change in transmitted optical intensity of 60%. Significant improvement of the sensing performance is obtained from the Fabry-Perot microcavity structure compared to a simple planar single membrane structure, which indicates the resonant effect of the Fabry-Perot cavity on the chemical sensor. The measured sensing characteristics suggest that the change in absorptance of P3DDT polymer inside the microcavity plays a major role, while the deflection of a microcavity membrane by the P3DDT polymer-induced surface tension gives tunability of the sensor to maximize the amplification of output response by adjusting the Fabry- Perot microcavity gap spacing.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsM.Edward Motamedi, Wayne Bailey
Pages171-178
Number of pages8
StatePublished - 1996
EventMicroelectronic Structures and MEMS for Optical Processing II - Austin, TX, USA
Duration: Oct 14 1996Oct 15 1996

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2881

Other

OtherMicroelectronic Structures and MEMS for Optical Processing II
CityAustin, TX, USA
Period10/14/9610/15/96

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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