Fabrication and characterization of Fe81Ga19 thin films

J. L. Weston, A. Butera, T. Lograsso, M. Shamsuzzoha, I. Zana, G. Zangari, J. Barnard

Research output: Contribution to journalArticlepeer-review

Abstract

In order to incorporate magnetostrictive actuators into microelectromechanical systems devices, thin film maguetoelastic materials must have both a high magnetostriction and a low saturation field. This work focuses on the fabrication and characterization of (110) oriented epitaxial FeGa thin films grown epitaxially on Cu on Si. The material in the bulk exhibits a large magnetostriction and in thin film form is here shown to be easily saturated in all in-plane orientations in fields under 500 Oe. Thin (less than 160 nm) FeGa films grow according to a single (110) variant on Cu(100)/Si(100). On the contrary, thick (160 nm) films exhibit multiple (110) variants.

Original languageEnglish (US)
Pages (from-to)2832-2834
Number of pages3
JournalIEEE Transactions on Magnetics
Volume38
Issue number5
DOIs
StatePublished - Sep 2002

Keywords

  • Epitaxy
  • Magnetoelastic materials
  • Microelectromechanical systems (MEMS)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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