Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates

Davood Shahrjerdi; N. Nuntawong; Tank Akyol; G. Balakrishnan; A. Khoshakhlagh; Sagnik Dey; S. R. Bank; Emanuel Tutuc; Diana Huffaker; Sanjay K. Banerjee

Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates

Davood Shahrjerdi, N. Nuntawong, Tank Akyol, G. Balakrishnan, A. Khoshakhlagh, Sagnik Dey, S. R. Bank, Emanuel Tutuc, Diana Huffaker, Sanjay K. Banerjee

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	North American Conference on Molecular Beam Epitaxy, 2007
State	Published - 2007

Cite this

@inproceedings{9596e8778b5f4cf9b55fc603f63730ff,

title = "Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates",

author = "Davood Shahrjerdi and N. Nuntawong and Tank Akyol and G. Balakrishnan and A. Khoshakhlagh and Sagnik Dey and Bank, {S. R.} and Emanuel Tutuc and Diana Huffaker and Banerjee, {Sanjay K.}",

year = "2007",

language = "English (US)",

booktitle = "North American Conference on Molecular Beam Epitaxy, 2007",

}

TY - GEN

T1 - Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates

AU - Shahrjerdi, Davood

AU - Nuntawong, N.

AU - Akyol, Tank

AU - Balakrishnan, G.

AU - Khoshakhlagh, A.

AU - Dey, Sagnik

AU - Bank, S. R.

AU - Tutuc, Emanuel

AU - Huffaker, Diana

AU - Banerjee, Sanjay K.

PY - 2007

Y1 - 2007

M3 - Conference contribution

BT - North American Conference on Molecular Beam Epitaxy, 2007

ER -