Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates

Davood Shahrjerdi, N. Nuntawong, Tank Akyol, G. Balakrishnan, A. Khoshakhlagh, Sagnik Dey, S. R. Bank, Emanuel Tutuc, Diana Huffaker, Sanjay K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationNorth American Conference on Molecular Beam Epitaxy, 2007
StatePublished - 2007

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Shahrjerdi, D., Nuntawong, N., Akyol, T., Balakrishnan, G., Khoshakhlagh, A., Dey, S., Bank, S. R., Tutuc, E., Huffaker, D., & Banerjee, S. K. (2007). Fabrication of metal gate/high-k GaAs MOS capacitors on Ge/Si1-xGex/Si substrates. In North American Conference on Molecular Beam Epitaxy, 2007