Fabrication of poly-Ge-based thermopiles on plastic

Bahareh Sadeghi Makki, Maryam Moradi, Ali Moafi, Shams Mohajerzadeh, Bahman Hekmatshoar, Davood Shahrjerdi

Research output: Contribution to journalArticle

Abstract

Fabrication of Ge-based thermocouple on polyethylene-terephthalate (PET) plastic substrates is reported. The amorphous Ge film, deposited using electron beam evaporation, is post treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120°C to 175°C and study of physical characteristics of Ge films using XRD and SEM confirms its crystallinity. A value of 100 μV/°C is extracted for the Ge-Al junctions. The thermocouple fabrication and its response to flow are reported. A novel approach is described to perform the micromachining of PET substrates for the formation of craters and membranes. Di-methyl-formamide (DMF) is used as the solvent of the PET substrate, masked with a Ge/Cu multilayer. An average chemical etch rate of 12 μm/h is achieved in the presence of 6.5 m W/cm 2 of 360-nm UV at ambient temperature.

Original languageEnglish (US)
Pages (from-to)743-748
Number of pages6
JournalIEEE Sensors Journal
Volume4
Issue number6
DOIs
StatePublished - Dec 2004

Keywords

  • Flexible substrates
  • Ge thermocouples
  • Micromachining
  • Polyethylene-terephthalate (PET) etching
  • Ultraviolet illumination

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Makki, B. S., Moradi, M., Moafi, A., Mohajerzadeh, S., Hekmatshoar, B., & Shahrjerdi, D. (2004). Fabrication of poly-Ge-based thermopiles on plastic. IEEE Sensors Journal, 4(6), 743-748. https://doi.org/10.1109/JSEN.2004.836862