Fabrication of poly-Ge-based thermopiles on plastic

Bahareh Sadeghi Makki; Maryam Moradi; Ali Moafi; Shams Mohajerzadeh; Bahman Hekmatshoar; Davood Shahrjerdi

doi:10.1109/JSEN.2004.836862

Fabrication of poly-Ge-based thermopiles on plastic

Bahareh Sadeghi Makki, Maryam Moradi, Ali Moafi, Shams Mohajerzadeh, Bahman Hekmatshoar, Davood Shahrjerdi

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Fabrication of Ge-based thermocouple on polyethylene-terephthalate (PET) plastic substrates is reported. The amorphous Ge film, deposited using electron beam evaporation, is post treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120°C to 175°C and study of physical characteristics of Ge films using XRD and SEM confirms its crystallinity. A value of 100 μV/°C is extracted for the Ge-Al junctions. The thermocouple fabrication and its response to flow are reported. A novel approach is described to perform the micromachining of PET substrates for the formation of craters and membranes. Di-methyl-formamide (DMF) is used as the solvent of the PET substrate, masked with a Ge/Cu multilayer. An average chemical etch rate of 12 μm/h is achieved in the presence of 6.5 m W/cm ² of 360-nm UV at ambient temperature.

Original language	English (US)
Pages (from-to)	743-748
Number of pages	6
Journal	IEEE Sensors Journal
Volume	4
Issue number	6
DOIs	https://doi.org/10.1109/JSEN.2004.836862
State	Published - Dec 2004

Keywords

Flexible substrates
Ge thermocouples
Micromachining
Polyethylene-terephthalate (PET) etching
Ultraviolet illumination

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

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10.1109/JSEN.2004.836862

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title = "Fabrication of poly-Ge-based thermopiles on plastic",

abstract = "Fabrication of Ge-based thermocouple on polyethylene-terephthalate (PET) plastic substrates is reported. The amorphous Ge film, deposited using electron beam evaporation, is post treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120°C to 175°C and study of physical characteristics of Ge films using XRD and SEM confirms its crystallinity. A value of 100 μV/°C is extracted for the Ge-Al junctions. The thermocouple fabrication and its response to flow are reported. A novel approach is described to perform the micromachining of PET substrates for the formation of craters and membranes. Di-methyl-formamide (DMF) is used as the solvent of the PET substrate, masked with a Ge/Cu multilayer. An average chemical etch rate of 12 μm/h is achieved in the presence of 6.5 m W/cm 2 of 360-nm UV at ambient temperature.",

keywords = "Flexible substrates, Ge thermocouples, Micromachining, Polyethylene-terephthalate (PET) etching, Ultraviolet illumination",

author = "Makki, {Bahareh Sadeghi} and Maryam Moradi and Ali Moafi and Shams Mohajerzadeh and Bahman Hekmatshoar and Davood Shahrjerdi",

note = "Funding Information: Manuscript received October 31, 2002; revised December 14, 2003. This work was supported in part by a grant from the Center of Excellence of Applied Electromagnetics, University of Tehran, Iran, in part by a grant from the Ministry of Industry, and in part by the Faculty of Engineering, University of Tehran. The associate editor coordinating the review of this paper and approving it for publication was Dr. Chang Liu.",

year = "2004",

month = dec,

doi = "10.1109/JSEN.2004.836862",

language = "English (US)",

volume = "4",

pages = "743--748",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - Fabrication of poly-Ge-based thermopiles on plastic

AU - Makki, Bahareh Sadeghi

AU - Moradi, Maryam

AU - Moafi, Ali

AU - Mohajerzadeh, Shams

AU - Hekmatshoar, Bahman

AU - Shahrjerdi, Davood

N1 - Funding Information: Manuscript received October 31, 2002; revised December 14, 2003. This work was supported in part by a grant from the Center of Excellence of Applied Electromagnetics, University of Tehran, Iran, in part by a grant from the Ministry of Industry, and in part by the Faculty of Engineering, University of Tehran. The associate editor coordinating the review of this paper and approving it for publication was Dr. Chang Liu.

PY - 2004/12

Y1 - 2004/12

N2 - Fabrication of Ge-based thermocouple on polyethylene-terephthalate (PET) plastic substrates is reported. The amorphous Ge film, deposited using electron beam evaporation, is post treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120°C to 175°C and study of physical characteristics of Ge films using XRD and SEM confirms its crystallinity. A value of 100 μV/°C is extracted for the Ge-Al junctions. The thermocouple fabrication and its response to flow are reported. A novel approach is described to perform the micromachining of PET substrates for the formation of craters and membranes. Di-methyl-formamide (DMF) is used as the solvent of the PET substrate, masked with a Ge/Cu multilayer. An average chemical etch rate of 12 μm/h is achieved in the presence of 6.5 m W/cm 2 of 360-nm UV at ambient temperature.

AB - Fabrication of Ge-based thermocouple on polyethylene-terephthalate (PET) plastic substrates is reported. The amorphous Ge film, deposited using electron beam evaporation, is post treated to form a polycrystalline film. The annealing process has been performed at temperatures ranging from 120°C to 175°C and study of physical characteristics of Ge films using XRD and SEM confirms its crystallinity. A value of 100 μV/°C is extracted for the Ge-Al junctions. The thermocouple fabrication and its response to flow are reported. A novel approach is described to perform the micromachining of PET substrates for the formation of craters and membranes. Di-methyl-formamide (DMF) is used as the solvent of the PET substrate, masked with a Ge/Cu multilayer. An average chemical etch rate of 12 μm/h is achieved in the presence of 6.5 m W/cm 2 of 360-nm UV at ambient temperature.

KW - Flexible substrates

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KW - Micromachining

KW - Polyethylene-terephthalate (PET) etching

KW - Ultraviolet illumination

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Fabrication of poly-Ge-based thermopiles on plastic

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Keywords

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