Fabrication of self-aligned enhancement-mode n-channel GaAs MOSFETs employing a wet clean process for GaAs substrates

D. Shahrjerdi, D. I. Garcia-Gutierrez, S. Kim, M. Hasan, K. Varahramyan, E. Tutuc, S. K. Banerjee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science