Fabrication of submicron wire networks using electron beam lithography

Richard J. Bojko, Richard Tiberio, Brian Whitehead, Allen M. Goldman, James Gordon, Fang Yu, Paul M. Chaikin, Carlos Wilks, Mark Itzler

    Research output: Contribution to journalArticle

    Abstract

    We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

    Original languageEnglish (US)
    Pages (from-to)31-34
    Number of pages4
    JournalMicroelectronic Engineering
    Volume11
    Issue number1-4
    DOIs
    StatePublished - Apr 1990

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

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  • Cite this

    Bojko, R. J., Tiberio, R., Whitehead, B., Goldman, A. M., Gordon, J., Yu, F., Chaikin, P. M., Wilks, C., & Itzler, M. (1990). Fabrication of submicron wire networks using electron beam lithography. Microelectronic Engineering, 11(1-4), 31-34. https://doi.org/10.1016/0167-9317(90)90067-4