Fault-detection relying on set-membership techniques for an Atomic Force Microscope

Vasso Reppa, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The objective of this article is the detection of tip-fractures as faults in the normal operation of an Atomic Force Microscope (AFM), where the system's characteristics (damping, tip-radius) vary. The system is modeled as a vibrating cantilever beam whose deflection can be measured. The measurements are assumed to be corrupted by noise within a priori known magnitude. The certainty sets within which the nominal time-varying parameters of the AFM reside are computed via a variation of an ellipsoidal Set Membership Identification technique. The fault is captured at the time instant of the existence of an outlier-measurement.

Original languageEnglish (US)
Title of host publicationSAFEPROCESS'09 - 7th IFAC International Symposium on Fault Detection, Supervision and Safety of Technical Systems, Proceedings
Pages1186-1191
Number of pages6
DOIs
StatePublished - 2009
Event7th IFAC International Symposium on Fault Detection, Supervision and Safety of Technical Systems, SAFEPROCESS'09 - Barcelona, Spain
Duration: Jun 30 2009Jul 3 2009

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
ISSN (Print)1474-6670

Other

Other7th IFAC International Symposium on Fault Detection, Supervision and Safety of Technical Systems, SAFEPROCESS'09
CountrySpain
CityBarcelona
Period6/30/097/3/09

Keywords

  • Fault detection
  • Fault isolation
  • Resonance microscopy

ASJC Scopus subject areas

  • Control and Systems Engineering

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