From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics

I. De Wolf, M. Rasras

Research output: Contribution to journalArticlepeer-review

Abstract

This paper discusses two techniques that have, at first sight, completely different applications: photon emission microscopy (PEM) and micro-Raman spectroscopy (μRS). We explain the principles of these techniques, their application domain, and we will show that they can in some cases offer complementary information, and be applied to common or similar problems.

Original languageEnglish (US)
Pages (from-to)59-65
Number of pages7
JournalEPJ Applied Physics
Volume27
Issue number1-3
DOIs
StatePublished - Jul 2004

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics

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