Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

Chao Zhao; M. N. Hedhili; Jingqi Li; Qingxiao Wang; Yang Yang; Long Chen; Liang Li

doi:10.1016/j.tsf.2013.06.010

Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

Chao Zhao, M. N. Hedhili, Jingqi Li, Qingxiao Wang, Yang Yang, Long Chen, Liang Li

Core Technology Platforms

Research output: Contribution to journal › Article › peer-review

Abstract

The growth of TiO₂ films by plasma enhanced atomic layer deposition using Star-Ti as a precursor has been systematically studied. The conversion from amorphous to crystalline TiO₂ was observed either during high temperature growth or annealing process of the films. The refractive index and bandgap of TiO₂ films changed with the growth and annealing temperatures. The optimization of the annealing conditions for TiO₂ films was also done by morphology and density studies.

Original language	English (US)
Pages (from-to)	38-44
Number of pages	7
Journal	Thin Solid Films
Volume	542
DOIs	https://doi.org/10.1016/j.tsf.2013.06.010
State	Published - Sep 2 2013

Keywords

Atomic force microscopy
Atomic layer deposition
Ellipsometer
Raman spectroscopy
TiO film
X-ray diffraction

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2013.06.010

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title = "Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition",

abstract = "The growth of TiO2 films by plasma enhanced atomic layer deposition using Star-Ti as a precursor has been systematically studied. The conversion from amorphous to crystalline TiO2 was observed either during high temperature growth or annealing process of the films. The refractive index and bandgap of TiO2 films changed with the growth and annealing temperatures. The optimization of the annealing conditions for TiO2 films was also done by morphology and density studies.",

keywords = "Atomic force microscopy, Atomic layer deposition, Ellipsometer, Raman spectroscopy, TiO film, X-ray diffraction",

author = "Chao Zhao and Hedhili, {M. N.} and Jingqi Li and Qingxiao Wang and Yang Yang and Long Chen and Liang Li",

year = "2013",

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doi = "10.1016/j.tsf.2013.06.010",

language = "English (US)",

volume = "542",

pages = "38--44",

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T1 - Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

AU - Zhao, Chao

AU - Hedhili, M. N.

AU - Li, Jingqi

AU - Wang, Qingxiao

AU - Yang, Yang

AU - Chen, Long

AU - Li, Liang

PY - 2013/9/2

Y1 - 2013/9/2

N2 - The growth of TiO2 films by plasma enhanced atomic layer deposition using Star-Ti as a precursor has been systematically studied. The conversion from amorphous to crystalline TiO2 was observed either during high temperature growth or annealing process of the films. The refractive index and bandgap of TiO2 films changed with the growth and annealing temperatures. The optimization of the annealing conditions for TiO2 films was also done by morphology and density studies.

AB - The growth of TiO2 films by plasma enhanced atomic layer deposition using Star-Ti as a precursor has been systematically studied. The conversion from amorphous to crystalline TiO2 was observed either during high temperature growth or annealing process of the films. The refractive index and bandgap of TiO2 films changed with the growth and annealing temperatures. The optimization of the annealing conditions for TiO2 films was also done by morphology and density studies.

KW - Atomic force microscopy

KW - Atomic layer deposition

KW - Ellipsometer

KW - Raman spectroscopy

KW - TiO film

KW - X-ray diffraction

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UR - http://www.scopus.com/inward/citedby.url?scp=84881314131&partnerID=8YFLogxK

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DO - 10.1016/j.tsf.2013.06.010

M3 - Article

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SN - 0040-6090

VL - 542

SP - 38

EP - 44

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition

Abstract

Keywords

ASJC Scopus subject areas

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