TY - GEN
T1 - High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer
AU - Mohammed, Zakriya
AU - Abe, Ibrahim M.Elfadel
AU - Rasras, Mahmoud
N1 - Funding Information:
This work was funded by Mubadala Development Company -Abu Dhabi, Economic Development Board-Singapore and GLOBALFOUNDRIES-Singapore under the framework of 'Twinlab' project with participation of A*STAR Institute of Microelectronics-Singapore(IME), Masdar Institute of Science and Technology-Abu Dhabi and GLOBALFOUNDRIES-Singapore.
Publisher Copyright:
© 2018 IEEE.
PY - 2018/6/22
Y1 - 2018/6/22
N2 - We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.
AB - We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.
KW - Accelerometer
KW - Impact durability
KW - Pull-in voltage
KW - Serpentine springs
KW - Stiction
KW - Torsional springs
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U2 - 10.1109/DTIP.2018.8394219
DO - 10.1109/DTIP.2018.8394219
M3 - Conference contribution
AN - SCOPUS:85050191002
T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
SP - 1
EP - 4
BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
A2 - Marcelli, Romolo
A2 - Mita, Yoshio
A2 - Smith, Stewart
A2 - Pressecq, Francis
A2 - Nouet, Pascal
A2 - Mailly, Frederick
A2 - Schneider, Peter
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
Y2 - 22 May 2018 through 25 May 2018
ER -