High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer

Zakriya Mohammed, Ibrahim M.Elfadel Abe, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on a high-sensitivity, Z-axis capacitive accelerometer with high dynamic range. The high sensitivity is achieved by implementing a varying capacitive gap method, and by maintaining a narrow air gap of 2μm between the proof-mass and the stator plates. As Z-axis vertical accelerometers are very prone to stiction to the stator plates, we add a complementary set of serpentine reliability springs in order to control the displacement during high g (g=3D9.8m/s2) acceleration. It is found that using such reliability springs, there is a considerable improvement in the dynamic range, pull-in voltage, mode spacing and impact durability. The device is fabricated using an Integrated Inertial MEMS 9 DOF platform from GLOBALFOUNDRIES. Results indicate a static capacitance of 8.02pF, a pull-in voltage of 9 Volts, a sensitivity of 12 fF/g, and dynamic range of 450g.

Original languageEnglish (US)
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
EditorsRomolo Marcelli, Yoshio Mita, Stewart Smith, Francis Pressecq, Pascal Nouet, Frederick Mailly, Peter Schneider
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538661994
DOIs
StatePublished - Jun 22 2018
Event20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 - Roma, Italy
Duration: May 22 2018May 25 2018

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

Other

Other20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
CountryItaly
CityRoma
Period5/22/185/25/18

Keywords

  • Accelerometer
  • Impact durability
  • Pull-in voltage
  • Serpentine springs
  • Stiction
  • Torsional springs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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