High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer

Zakriya Mohammed, Ibrahim M.Elfadel Abe, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'High dynamic range Z-axis hybrid spring MEMS capacitive accelerometer'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds