High-speed, sub-15 nm feature size thermochemical nanolithography

Robert Szoszkiewicz, Takashi Okada, Simon C. Jones, Tai De Li, William P. King, Seth R. Marder, Elisa Riedo

Research output: Contribution to journalArticlepeer-review


We report a nanolithography technique that allows simultaneous direct control of the local chemistry and topography of thin polymer films. Specifically, a heated atomic force microscope (AFM) tip can write sub-15 nm hydrophilic features onto a hydrophobic polymer at the rate of 1.4 mm per s. The thermally activated chemical reactions and topography changes depend on the chemical composition of the polymer, the raster speed, the temperature at the AFM tip/sample interface, and the normal load. This method is conceptually simple, direct, extremely rapid, achievable in a range of environments, and potentially adaptable to other materials systems.

Original languageEnglish (US)
Pages (from-to)1064-1069
Number of pages6
JournalNano Letters
Issue number4
StatePublished - Apr 2007

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering


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