Impact of NH3 and N2 plasma passivation on the interface of germanium MOS capacitors

Ghada H. Dushaq, Mahmoud Rasras, Ammar M. Nayfeh

Research output: Contribution to journal › Article › peer-review

Cite this

@article{cbdcd9aecdc54770b98cf08d88f5fa8f,

title = "Impact of NH3 and N2 plasma passivation on the interface of germanium MOS capacitors",

author = "Dushaq, {Ghada H.} and Mahmoud Rasras and Nayfeh, {Ammar M.}",

year = "2016",

language = "English (US)",

volume = "8",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "661-666",

}