Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography

Yoshikazu Hirai; Yusuke Tsuji; Ken Ichiro Kamei; Toshiyuki Tsuchiya; Osamu Tabata

doi:10.1109/MEMSYS.2018.8346602

Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography

Yoshikazu Hirai, Yusuke Tsuji, Ken Ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata

Biology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents the novel fabrication of highly sensitive ionic liquid-based pressure sensor integrated in a poly(dimethylsiloxane) microfluidic device. The proposed fabrication method provides an ability to simultaneous fabrication of the pressure sensor and microfluidic components by multilayer soft lithography. To improve the sensitivity in a low-pressure range, sensor structure and electrical output are investigated by a numerical simulation. Then the analyzed sensor structure is precisely fabricated by three-dimensional (3D) lithography utilizing a numerical process optimization. Both numerical and experimental results revealed the sensor output depends on a cross section geometry of ionic liquid-filled channel, and confirmed the improved sensitivity.

Original language	English (US)
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	511-514
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346602
State	Published - Apr 24 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: Jan 21 2018 → Jan 25 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	1/21/18 → 1/25/18

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2018.8346602

Cite this

Hirai, Y., Tsuji, Y., Kamei, K. I., Tsuchiya, T., & Tabata, O. (2018). Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 511-514). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346602

Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography. / Hirai, Yoshikazu; Tsuji, Yusuke; Kamei, Ken Ichiro et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 511-514 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hirai, Y, Tsuji, Y, Kamei, KI, Tsuchiya, T & Tabata, O 2018, Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 511-514, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 1/21/18. https://doi.org/10.1109/MEMSYS.2018.8346602

Hirai Y, Tsuji Y, Kamei KI, Tsuchiya T, Tabata O. Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 511-514. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346602

Hirai, Yoshikazu ; Tsuji, Yusuke ; Kamei, Ken Ichiro et al. / Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 511-514 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper presents the novel fabrication of highly sensitive ionic liquid-based pressure sensor integrated in a poly(dimethylsiloxane) microfluidic device. The proposed fabrication method provides an ability to simultaneous fabrication of the pressure sensor and microfluidic components by multilayer soft lithography. To improve the sensitivity in a low-pressure range, sensor structure and electrical output are investigated by a numerical simulation. Then the analyzed sensor structure is precisely fabricated by three-dimensional (3D) lithography utilizing a numerical process optimization. Both numerical and experimental results revealed the sensor output depends on a cross section geometry of ionic liquid-filled channel, and confirmed the improved sensitivity.",

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AB - This paper presents the novel fabrication of highly sensitive ionic liquid-based pressure sensor integrated in a poly(dimethylsiloxane) microfluidic device. The proposed fabrication method provides an ability to simultaneous fabrication of the pressure sensor and microfluidic components by multilayer soft lithography. To improve the sensitivity in a low-pressure range, sensor structure and electrical output are investigated by a numerical simulation. Then the analyzed sensor structure is precisely fabricated by three-dimensional (3D) lithography utilizing a numerical process optimization. Both numerical and experimental results revealed the sensor output depends on a cross section geometry of ionic liquid-filled channel, and confirmed the improved sensitivity.

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Improved sensitivity of ionic liquid-based pressure sensor for body-on-a-chip using simulation-based 3D lithography

Abstract

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