In situ probing and atomistic simulation of a-Si:H plasma deposition

Eray S. Aydil, Dimitrios Maroudas, Denise C. Marra, W. M.M. Kessels, Sumit Agarwal, Shyam Ramalingam, Saravanapriyan Sriraman, M. C.M. Van de Sanden, Akihiro Takano

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'In situ probing and atomistic simulation of a-Si:H plasma deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy