| Original language | English (US) |
|---|---|
| Place of Publication | Boston |
| Publisher | Academic Press |
| State | Published - 1999 |
Publication series
| Name | Thin Films |
|---|---|
| Volume | 27 |
Ionized physical vapor deposition
R Powell, Abraham Ulman
Research output: Book/Report › Book
R Powell, Abraham Ulman
Research output: Book/Report › Book
| Original language | English (US) |
|---|---|
| Place of Publication | Boston |
| Publisher | Academic Press |
| State | Published - 1999 |
| Name | Thin Films |
|---|---|
| Volume | 27 |