Lithography with a Pattern of Block Copolymer Microdomains as a Positive or Negative Resist

Christopher Harrison, Miri Park, Paul M. Chaikin, Richard A. Register, Douglas H. Adamson

    Research output: Contribution to journalArticlepeer-review

    Fingerprint

    Dive into the research topics of 'Lithography with a Pattern of Block Copolymer Microdomains as a Positive or Negative Resist'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Chemical Compounds