Low loss amorphous silicon channel waveguides for integrated photonics

D. K. Sparacin; R. Sun; A. M. Agarwal; M. A. Beals; J. Michel; L. C. Kimerling; T. J. Conway; A. T. Pomerene; D. N. Carothers; M. J. Grove; D. M. Gill; M. S. Rasras; S. S. Patel; A. E. White

doi:10.1109/group4.2006.1708231

Low loss amorphous silicon channel waveguides for integrated photonics

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, A. E. White

Research output: Contribution to journal › Article › peer-review

Abstract

Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses < 1 dB/cm.

Original language	English (US)
Article number	1708231
Pages (from-to)	255-257
Number of pages	3
Journal	IEEE International Conference on Group IV Photonics GFP
DOIs	https://doi.org/10.1109/group4.2006.1708231
State	Published - 2006

ASJC Scopus subject areas

Electrical and Electronic Engineering
Ceramics and Composites
Electronic, Optical and Magnetic Materials

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10.1109/group4.2006.1708231

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Sparacin, D. K., Sun, R., Agarwal, A. M., Beals, M. A., Michel, J., Kimerling, L. C., Conway, T. J., Pomerene, A. T., Carothers, D. N., Grove, M. J., Gill, D. M., Rasras, M. S., Patel, S. S., & White, A. E. (2006). Low loss amorphous silicon channel waveguides for integrated photonics. IEEE International Conference on Group IV Photonics GFP, 255-257. Article 1708231. https://doi.org/10.1109/group4.2006.1708231

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title = "Low loss amorphous silicon channel waveguides for integrated photonics",

abstract = "Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses < 1 dB/cm.",

author = "Sparacin, {D. K.} and R. Sun and Agarwal, {A. M.} and Beals, {M. A.} and J. Michel and Kimerling, {L. C.} and Conway, {T. J.} and Pomerene, {A. T.} and Carothers, {D. N.} and Grove, {M. J.} and Gill, {D. M.} and Rasras, {M. S.} and Patel, {S. S.} and White, {A. E.}",

year = "2006",

doi = "10.1109/group4.2006.1708231",

language = "English (US)",

pages = "255--257",

journal = "IEEE International Conference on Group IV Photonics GFP",

issn = "1949-2081",

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TY - JOUR

T1 - Low loss amorphous silicon channel waveguides for integrated photonics

AU - Sparacin, D. K.

AU - Sun, R.

AU - Agarwal, A. M.

AU - Beals, M. A.

AU - Michel, J.

AU - Kimerling, L. C.

AU - Conway, T. J.

AU - Pomerene, A. T.

AU - Carothers, D. N.

AU - Grove, M. J.

AU - Gill, D. M.

AU - Rasras, M. S.

AU - Patel, S. S.

AU - White, A. E.

PY - 2006

Y1 - 2006

N2 - Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses < 1 dB/cm.

AB - Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses < 1 dB/cm.

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DO - 10.1109/group4.2006.1708231

M3 - Article

AN - SCOPUS:78649730377

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EP - 257

JO - IEEE International Conference on Group IV Photonics GFP

JF - IEEE International Conference on Group IV Photonics GFP

M1 - 1708231

ER -

Low loss amorphous silicon channel waveguides for integrated photonics

Abstract

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