Low loss amorphous silicon channel waveguides for integrated photonics

D. K. Sparacin, R. Sun, A. M. Agarwal, M. A. Beals, J. Michel, L. C. Kimerling, T. J. Conway, A. T. Pomerene, D. N. Carothers, M. J. Grove, D. M. Gill, M. S. Rasras, S. S. Patel, A. E. White

Research output: Contribution to journalArticlepeer-review


Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses < 1 dB/cm.

Original languageEnglish (US)
Article number1708231
Pages (from-to)255-257
Number of pages3
JournalIEEE International Conference on Group IV Photonics GFP
StatePublished - 2006

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials


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