Abstract
Low temperature copper-induced crystallization of amorphous germanium (a-Ge) has been significantly enhanced by applying mechanical compressive stress during thermal post-treatment. Manipulation of this technique, alongside with proper patterning of the a-Ge layer before thermo-mechanical process, has led to growth of device-quality poly-Ge layer on flexible PET substrate at temperatures as low as 130°C. Flexibility of the substrate allows the efficient application of uniaxial compressive stress by bending the PET sheets inward. Effects of compressive stress and ultimate crystallization of the Ge layer has been verified by electrical sheet resistance and Hall mobility measurements, and analyzed by XRD, SEM, TEM and RAMAN spectroscopy.
Original language | English (US) |
---|---|
Pages (from-to) | 183-188 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 769 |
State | Published - 2003 |
Event | Flexible Electronics - Materials and Device Technology - San Francisco, CA, United States Duration: Apr 22 2003 → Apr 25 2003 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering