Low-temperature epitaxy of compressively strained silicon directly on silicon substrates

D. Shahrjerdi, B. Hekmatshoar, S. W. Bedell, M. Hopstaken, D. K. Sadana

Research output: Contribution to journal › Article › peer-review

Fingerprint

Dive into the research topics of 'Low-temperature epitaxy of compressively strained silicon directly on silicon substrates'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy