| Original language | English (US) |
|---|---|
| Title of host publication | Material research Society (MRS) |
| Place of Publication | Phoenix, Arizona, USA |
| State | Published - 2017 |
Low Temperature Germanium Surface Passivation Formed using in situ NH3/N2 PECVD Nitration for High Quality Ge-MOS Capacitors
Ghada H. Dushaq, Mahmoud Rasras, Ammar Nayfeh
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution