Low Temperature Growth of Germanium on Silicon Using RF-PECVD for Electronic and Optoelectronic Application

Ghada H. Dushaq, Ammar Nayfeh, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationECS Meeting Abstracts
StatePublished - 2018

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