Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry

Sumit Agarwal, Guido W.W. Quax, M. C.M. Van de Sanden, Dimitrios Maroudas, Eray S. Aydil

Research output: Contribution to journalArticle

Abstract

Measurement of absolute radical densities using line-of-sight threshold ionization mass spectrometry (LOS-TIMS) was discussed. The O, O 2 and Ar densities and the average neutral-gas temperature in an O 2/Ar electrical discharge were measured as a function of pressure in the plasma chamber. Collisions within the molecular beam extracted from the discharge was also studied for higher plasma chamber pressures. It was found that the O atom density increases with pressure and O 2 mole fraction in the feed gas and is in the range of 2.1×10 18-2.6×10 19 m -3.

Original languageEnglish (US)
Pages (from-to)71-81
Number of pages11
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume22
Issue number1
DOIs
StatePublished - Jan 2004

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry'. Together they form a unique fingerprint.

  • Cite this