Micro-opto-mechanical disk for inertia sensing

Ghada H. Dushaq, Tadesse Muluget, Mahmoud Rasras

Research output: Contribution to journalArticlepeer-review


An optically enabled z-axis micro-disk inertia sensor is presented, which consists of a disk-shaped proof mass integrated on top of an optical waveguide. Numerical simulations show that the optical power of laser beam propagating in a narrow silicon nitride (Si3N4) waveguide located under the disk is attenuated in response to the vertical movement of the micro-disk. The high leakage power of the TM mode can effectively be used to detect a dynamic range of 1 g‒10 g (g=9.8 m/s2). At lest, the waveguide is kept at a nominal gap of 1 µm from the proof mass. It is adiabatically tapered to a narrow dimension of W×H = 350×220 nm2 in a region where the optical mode is intended to interact with the proof mass. Furthermore, the bottom cladding is completely etched away to suspend the waveguide and improve the optical interaction with the proof mass. The proposed optical inertia sensor has a high sensitivity of 3 dB/g when a 50 µm-long waveguide is used (normalized sensitivity 0.5 dB/µm2) for the vertical movement detection.

Original languageEnglish (US)
Pages (from-to)78-84
Number of pages7
JournalPhotonic Sensors
Issue number1
StatePublished - Mar 1 2016


  • Micro-opto-Mechanical system
  • hybrid integration
  • photonic inertia sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics


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