Modeling and analysis of the squeezed film damping effect on electrostatic microactuators

Marialena Vagia, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.

Original languageEnglish (US)
Title of host publication2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08
Pages469-474
Number of pages6
DOIs
StatePublished - 2008
Event2008 Mediterranean Conference on Control and Automation, MED'08 - Ajaccio-Corsica, France
Duration: Jun 25 2008Jun 27 2008

Publication series

Name2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08

Other

Other2008 Mediterranean Conference on Control and Automation, MED'08
CountryFrance
CityAjaccio-Corsica
Period6/25/086/27/08

ASJC Scopus subject areas

  • Control and Systems Engineering

Fingerprint Dive into the research topics of 'Modeling and analysis of the squeezed film damping effect on electrostatic microactuators'. Together they form a unique fingerprint.

Cite this