TY - GEN
T1 - Modeling and analysis of the squeezed film damping effect on electrostatic microactuators
AU - Vagia, Marialena
AU - Tzes, Anthony
PY - 2008
Y1 - 2008
N2 - In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.
AB - In this article the modeling aspects of an electro-static microactuator with squeezed thin film damping effects are presented. The actuator is composed of a microcapacitor whose one plate is clamped on the ground while the other plate is floating on the air with the aid of an external supporting spring. Its highly nonlinear dynamic model is linearized at various operating points. Variations of the gap between the plates and the air pressure of the system are examined in order to find possible changes in the bifurcation points or other characteristics of the system. Significant conclusions for the case of the bifurcation point have been drawn and simulation studies substantiate the presented results.
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U2 - 10.1109/MED.2008.4602247
DO - 10.1109/MED.2008.4602247
M3 - Conference contribution
AN - SCOPUS:52949101734
SN - 9781424425051
T3 - 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08
SP - 469
EP - 474
BT - 2008 Mediterranean Conference on Control and Automation - Conference Proceedings, MED'08
T2 - 2008 Mediterranean Conference on Control and Automation, MED'08
Y2 - 25 June 2008 through 27 June 2008
ER -