Modeling and Gain Scheduling Design for an Electrostatic Micro-Actuator with Squeezed Film Damping Effects

Marialena Vagia, Anthony Tzes

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)234-241
JournalMicro and Nanosystems
Volume1
Issue number3
StatePublished - Nov 2009
Externally publishedYes

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