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Modeling of heat transport and wafer heating effects during plasma etching
Derek Tretheway,
Eray S. Aydil
Chemical and Biomolecular Engineering
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Article
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peer-review
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Dive into the research topics of 'Modeling of heat transport and wafer heating effects during plasma etching'. Together they form a unique fingerprint.
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Engineering
Heating Effect
100%
Heat Transport
100%
Back Side
100%
Deposition Process
25%
Mathematical Model
25%
Spatial Variation
25%
Temperature Profile
25%
Model Prediction
25%
Mathematical Modeling
25%
Pressure Increase
25%
Etching Process
25%
Energy Transport
25%
Ion Implantation
25%
Si Wafer
25%
Heat Transfer Rate
25%
Keyphrases
Wafer Heating
100%
Wafer Temperature
50%
Wafer Edge
50%
Side Pressure
37%
Thermal Contact
25%
Radial Uniformity
12%
Temperature Uniformity
12%
Wafer Bowing
12%
Cooled Electrode
12%
Side Cooling
12%
Radial Temperature Profile
12%
Flux Uniformity
12%
Material Science
Plasma Etching
100%
Ion Implantation
25%