Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements

Ellen Meeks, Richard S. Larson, Pauline Ho, Christopher Apblett, Sang M. Han, Erik Edelberg, Eray S. Aydil

Research output: Contribution to journal › Review article › peer-review

Fingerprint

Dive into the research topics of 'Modeling of SiO2 deposition in high density plasma reactors and comparisons of model predictions with experimental measurements'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds