Original language | English (US) |
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Title of host publication | Outlook and Challenges of Nano Devices, Sensors, and MEMS |
Publisher | Springer International Publishing |
Pages | 331-345 |
Number of pages | 15 |
ISBN (Electronic) | 9783319508245 |
ISBN (Print) | 9783319508221 |
DOIs | |
State | Published - Jan 1 2017 |
ASJC Scopus subject areas
- General Engineering