TY - JOUR
T1 - Modification and application of an emission microscope for continuous wavelength spectroscopy
AU - Rasras, M.
AU - De Wolf, I.
AU - Groeseneken, G.
AU - Maes, H. E.
N1 - Funding Information:
This project was sponsored by the Flemish IWT960107 project (KWINT). ~RS was done in the frame of the EC project SMT4-CT95-2024D912-RSMT (Nostradamuns). Simac Masic b.v. (Veldhoven, The Netherlands) is acknowledged for help in design and fabrication of the mechanical parts of the SPEMMI.
PY - 1997
Y1 - 1997
N2 - A simple, cost effective, and highly sensitive spectroscopic technique for photon emission microscopy is proposed (SPEMMI). In contrast to earlier reported systems, this new system uses only one detector for both conventional failure localisation and spectral analysis. To demonstrate the functionality of the SPEMMI, emission spectra from forward and reversed biased diodes, and from a poly-Si resistor are presented. In addition, it is shown that the instrument allows fast determination, with μm resolution, of the temperature profile of devices.
AB - A simple, cost effective, and highly sensitive spectroscopic technique for photon emission microscopy is proposed (SPEMMI). In contrast to earlier reported systems, this new system uses only one detector for both conventional failure localisation and spectral analysis. To demonstrate the functionality of the SPEMMI, emission spectra from forward and reversed biased diodes, and from a poly-Si resistor are presented. In addition, it is shown that the instrument allows fast determination, with μm resolution, of the temperature profile of devices.
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U2 - 10.1016/S0026-2714(97)00118-2
DO - 10.1016/S0026-2714(97)00118-2
M3 - Article
AN - SCOPUS:0031246684
SN - 0026-2714
VL - 37
SP - 1595
EP - 1598
JO - Microelectronics Reliability
JF - Microelectronics Reliability
IS - 10-11
ER -