Modification and application of an emission microscope for continuous wavelength spectroscopy

M. Rasras, I. De Wolf, G. Groeseneken, H. E. Maes

Research output: Contribution to journalArticle

Abstract

A simple, cost effective, and highly sensitive spectroscopic technique for photon emission microscopy is proposed (SPEMMI). In contrast to earlier reported systems, this new system uses only one detector for both conventional failure localisation and spectral analysis. To demonstrate the functionality of the SPEMMI, emission spectra from forward and reversed biased diodes, and from a poly-Si resistor are presented. In addition, it is shown that the instrument allows fast determination, with μm resolution, of the temperature profile of devices.

Original languageEnglish (US)
Pages (from-to)1595-1598
Number of pages4
JournalMicroelectronics Reliability
Volume37
Issue number10-11
DOIs
StatePublished - 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Safety, Risk, Reliability and Quality
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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