Molecular dynamics study of the interactions of small thermal and energetic silicon clusters with crystalline and amorphous silicon surfaces

Shyam Ramalingam, Eray S. Aydil, Dimitrios Maroudas

Research output: Contribution to journalConference articlepeer-review

Abstract

The interactions of small thermal and energetic silicon clusters with crystalline and amorphous silicon surfaces observed in various plasmas were studied using molecular dynamics. Hydrogenated amorphous silicon film growth rates were obtained by employing a unit reaction probability for clusters of different sizes on silicon surfaces. Results showed that the clusters react with surface of amorphous silicon films and crystalline surfaces with high probability. The energetics and structures of adsorbed cluster configurations on these surfaces were also analyzed.

Original languageEnglish (US)
Pages (from-to)634-644
Number of pages11
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number3
DOIs
StatePublished - 2001
Event13th International Vaccum Microelectronics Conference - Guangzhou, China
Duration: Aug 14 2000Aug 17 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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