Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge sustained by circular TM11 mode fields

S. C. Kuo, S. P. Kuo

Research output: Contribution to journalArticle

Abstract

Electron behavior in an electron cyclotron resonance microwave discharge sustained by TM11 mode fields of a cylindrical waveguide has been investigated via a Monte Carlo simulation. The time averaged, spatially dependent electron energy distribution is computed self-consistently. At low pressures (∼0.5 mTorr). the temperature of the tail portion of the electron energy distribution exceeds 40 eV, and the sheath potential is about -250 V. These results, which are about twice as high as the previous results for TM01 mode fields [S. C. Kuo, E. E. Kunhardt, and S. P. Kuo, J. Appl. Phys. 73, 4197 (1993)], suggest that TM11 mode fields have a stronger electron cyclotron resonance effect than TM01 mode fields in a cylindrical waveguide.

Original languageEnglish (US)
Pages (from-to)2512-2514
Number of pages3
JournalJournal of Applied Physics
Volume80
Issue number4
DOIs
StatePublished - Aug 15 1996

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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