| Original language | English (US) |
|---|---|
| Title of host publication | Appl. Diamond Films, 3rd Int. Conference |
| Pages | 669-672 |
| State | Published - 1995 |
Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge using circular TM11 mode fields
S.C. Kuo, Spencer Kuo
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution