Multi-parametric H∞ control of a micro-actuator

Anthony Tzes, George Nikolakopoulos, Leonidas Dritsas, Yiannis Koveos

Research output: Chapter in Book/Report/Conference proceedingConference contribution


in this article the control problem of a micro-actuator (μ - A) is considered. The μ - A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate's motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics of the plate's rigid-body motion results in an unstable, nonlinear system of distributed nature. Utilization of FEM can approximate the μ - A dynamics nonlinear-PDE to a finite nonlinear-ODE. The nonlinearity stems from the plate's rigid-body motion, while all flexibility effects are considered as additive linear-terms. A controller composed of: a) a feedforward term for regulation at selected setpoints, and b) a constrained finite time optimal controller to handle any deviations from the equilibrium is synthesized. Simulation studies are used to investigate the efficacy of the suggested controller

Original languageEnglish (US)
Title of host publicationProceedings of the 16th IFAC World Congress, IFAC 2005
PublisherIFAC Secretariat
Number of pages6
ISBN (Print)008045108X, 9780080451084
StatePublished - 2005

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
ISSN (Print)1474-6670


  • MEMs
  • Micro-actuator
  • Optimal control

ASJC Scopus subject areas

  • Control and Systems Engineering


Dive into the research topics of 'Multi-parametric H∞ control of a micro-actuator'. Together they form a unique fingerprint.

Cite this