Multiple steady states in electron cyclotron resonance plasma reactors

Engineering & Materials Science

• Electron cyclotron resonance 100%
• Plasmas 51%
• Langmuir probes 9%
• Charge density 7%
• Linewidth 6%
• Etching 5%
• Microelectronics 5%
• Wave propagation 5%

Physics & Astronomy

• electron cyclotron resonance 60%
• reactors 42%
• hysteresis 8%
• platens 8%
• plasma currents 6%
• electrostatic probes 6%
• microelectronics 5%
• floating 5%
• selectivity 5%

Chemical Compounds

• Plasma 34%
• Hysteresis 12%
• Microelectronics 6%
• Charge Density 5%
• Magnetic Field 5%
• Etching 5%