Multiple steady states in electron cyclotron resonance plasma reactors

Eray S. Aydil, Jeffrey A. Gregus, Richard A. Gottscho

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Multiple steady states in electron cyclotron resonance plasma reactors'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds