Novel methods for nanolithography

Christopher Harrison, Miri Park, Paul Chaikin, Richard A. Register, Douglas H. Adamson

    Research output: Contribution to journalConference articlepeer-review

    Abstract

    Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.

    Original languageEnglish (US)
    Pages (from-to)821-822
    Number of pages2
    JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
    Volume37
    Issue number2
    StatePublished - Aug 1996
    EventProceedings of the 1996 ACS Orlando Meeting - Orlando, FL, USA
    Duration: Aug 25 1996Aug 29 1996

    ASJC Scopus subject areas

    • Polymers and Plastics

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