@inproceedings{5268d1f28adb44b49a3a409eb6a16684,
title = "Optimization of finger spacing and spring constant in comb type capacitive accelerometer",
abstract = "In variable gap changing capacitive accelerometer with two different gap spacing (finger gap and anti-finger gap) it is necessary to optimize the gap spacing to enhance sensitivity. In addition the spring constant must also be optimize to produce linear change of displacement with acceleration. In the present paper numerical simulations are carried out in CoventorWare and Matlab to find the optimum value of both parameters.",
keywords = "Accelerometer, Spring constant, anti-gap spacing, finger gap spacing, gap Spacing",
author = "Zakriya Mohammed and Mahmoud Rasras",
year = "2016",
month = oct,
day = "12",
doi = "10.1109/INEC.2016.7589291",
language = "English (US)",
series = "Proceedings - International NanoElectronics Conference, INEC",
publisher = "IEEE Computer Society",
booktitle = "7th IEEE International Nanoelectronics Conference 2016, INEC 2016",
note = "7th IEEE International Nanoelectronics Conference, INEC 2016 ; Conference date: 09-05-2016 Through 11-05-2016",
}