Optimization of finger spacing and spring constant in comb type capacitive accelerometer

Zakriya Mohammed, Mahmoud Rasras

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In variable gap changing capacitive accelerometer with two different gap spacing (finger gap and anti-finger gap) it is necessary to optimize the gap spacing to enhance sensitivity. In addition the spring constant must also be optimize to produce linear change of displacement with acceleration. In the present paper numerical simulations are carried out in CoventorWare and Matlab to find the optimum value of both parameters.

Original languageEnglish (US)
Title of host publication7th IEEE International Nanoelectronics Conference 2016, INEC 2016
PublisherIEEE Computer Society
ISBN (Electronic)9781467389693
DOIs
StatePublished - Oct 12 2016
Event7th IEEE International Nanoelectronics Conference, INEC 2016 - Chengdu, China
Duration: May 9 2016May 11 2016

Publication series

NameProceedings - International NanoElectronics Conference, INEC
Volume2016-October
ISSN (Print)2159-3523

Other

Other7th IEEE International Nanoelectronics Conference, INEC 2016
CountryChina
CityChengdu
Period5/9/165/11/16

Keywords

  • Accelerometer
  • Spring constant
  • anti-gap spacing
  • finger gap spacing
  • gap Spacing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Mohammed, Z., & Rasras, M. (2016). Optimization of finger spacing and spring constant in comb type capacitive accelerometer. In 7th IEEE International Nanoelectronics Conference 2016, INEC 2016 [7589291] (Proceedings - International NanoElectronics Conference, INEC; Vol. 2016-October). IEEE Computer Society. https://doi.org/10.1109/INEC.2016.7589291