Overshoot of HF-enhanced plasma lines due to resonance broadening effects

Spencer Kuo, M.C. Lee, FT Djuth

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationIES's Proc., Virginia, May 1987
StatePublished - 1987

Publication series

NamePaper 3B-4

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