Parallelization of thermochemical nanolithography

Keith M. Carroll; Xi Lu; Suenne Kim; Yang Gao; Hoe Joon Kim; Suhas Somnath; Laura Polloni; Roman Sordan; William P. King; Jennifer E. Curtis; Elisa Riedo

doi:10.1039/c3nr05696a

Parallelization of thermochemical nanolithography

Keith M. Carroll, Xi Lu, Suenne Kim, Yang Gao, Hoe Joon Kim, Suhas Somnath, Laura Polloni, Roman Sordan, William P. King, Jennifer E. Curtis, Elisa Riedo

Chemical and Biomolecular Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Original language	English (US)
Pages (from-to)	1299-1304
Number of pages	6
Journal	Nanoscale
Volume	6
Issue number	3
DOIs	https://doi.org/10.1039/c3nr05696a
State	Published - Feb 7 2014

ASJC Scopus subject areas

General Materials Science

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10.1039/c3nr05696a

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abstract = "One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.",

author = "Carroll, {Keith M.} and Xi Lu and Suenne Kim and Yang Gao and Kim, {Hoe Joon} and Suhas Somnath and Laura Polloni and Roman Sordan and King, {William P.} and Curtis, {Jennifer E.} and Elisa Riedo",

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T1 - Parallelization of thermochemical nanolithography

AU - Carroll, Keith M.

AU - Lu, Xi

AU - Kim, Suenne

AU - Gao, Yang

AU - Kim, Hoe Joon

AU - Somnath, Suhas

AU - Polloni, Laura

AU - Sordan, Roman

AU - King, William P.

AU - Curtis, Jennifer E.

AU - Riedo, Elisa

PY - 2014/2/7

Y1 - 2014/2/7

N2 - One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

AB - One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

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U2 - 10.1039/c3nr05696a

DO - 10.1039/c3nr05696a

M3 - Article

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VL - 6

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EP - 1304

JO - Nanoscale

JF - Nanoscale

IS - 3

ER -

Parallelization of thermochemical nanolithography

Abstract

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