Parallelization of thermochemical nanolithography

Keith M. Carroll, Xi Lu, Suenne Kim, Yang Gao, Hoe Joon Kim, Suhas Somnath, Laura Polloni, Roman Sordan, William P. King, Jennifer E. Curtis, Elisa Riedo

Research output: Contribution to journalArticle

Abstract

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Original languageEnglish (US)
Pages (from-to)1299-1304
Number of pages6
JournalNanoscale
Volume6
Issue number3
DOIs
StatePublished - Feb 7 2014

ASJC Scopus subject areas

  • Materials Science(all)

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    Carroll, K. M., Lu, X., Kim, S., Gao, Y., Kim, H. J., Somnath, S., Polloni, L., Sordan, R., King, W. P., Curtis, J. E., & Riedo, E. (2014). Parallelization of thermochemical nanolithography. Nanoscale, 6(3), 1299-1304. https://doi.org/10.1039/c3nr05696a