Physical and electrical characterization of the interface between atomic-layer-deposited Al2O3 on GaAs substrates for CMOS applications

D. I. Garcia-Gutierrez, V. Kaushik, D. Shahrjerdi, S. K. Banerjee

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)446-447
Number of pages2
JournalMicroscopy and Microanalysis
Volume14
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 2008

ASJC Scopus subject areas

  • Instrumentation

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