Original language | English (US) |
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Article number | 051601 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 38 |
Issue number | 5 |
DOIs | |
State | Published - Sep 1 2020 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films