Preface for the special topic collection commemorating the career of John Coburn

TY - JOUR

T1 - Preface for the special topic collection commemorating the career of John Coburn

AU - Kay, Eric

AU - Graves, David B.

AU - Aydil, Eray S.

PY - 2020/12/1

Y1 - 2020/12/1

UR - http://www.scopus.com/inward/record.url?scp=85094560127&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85094560127&partnerID=8YFLogxK

U2 - 10.1116/6.0000643

DO - 10.1116/6.0000643

M3 - Editorial

AN - SCOPUS:85094560127

SN - 0734-2101

VL - 38

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

M1 - 061602

ER -