Properties of the rf discharge in Ar-TEOS mixtures

R. Foest, R. Basner, M. Schmidt, F. Hempel, Kurt Becker

Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review

Cite this

@inbook{d0f94018cb5a4d4faaf308e71427b736,

title = "Properties of the rf discharge in Ar-TEOS mixtures",

author = "R. Foest and R. Basner and M. Schmidt and F. Hempel and Kurt Becker",

year = "1998",

language = "English (US)",

pages = "161--166",

editor = "L.G. Christophorou",

booktitle = "Gaseous dielectrics VIII",

publisher = "Plenum Press",

}