Pull-in instability in elecrostatically actuated MEMS

R. C. Batra, Maurizio Porfiri, D. Spinello

Research output: Chapter in Book/Report/Conference proceeding › Chapter (peer-reviewed) › peer-review

Original language	English (US)
Title of host publication	Advances in multiphysics simulation of MEMS and NEMS
Editors	N. Aluru, C. Cercignani, A. Frangi, S. Mukherjee
Publisher	Imperial College Press
Pages	329-374
State	Published - 2008

Cite this

@inbook{d3ab41595b014720a0d15f98ae6edd06,

title = "Pull-in instability in elecrostatically actuated MEMS",

author = "Batra, {R. C.} and Maurizio Porfiri and D. Spinello",

year = "2008",

language = "English (US)",

pages = "329--374",

editor = "Aluru, {N. } and C. Cercignani and A. Frangi and S. Mukherjee",

booktitle = "Advances in multiphysics simulation of MEMS and NEMS",

publisher = "Imperial College Press",

}