Pull-in instability in elecrostatically actuated MEMS

R. C. Batra, Maurizio Porfiri, D. Spinello

Research output: Chapter in Book/Report/Conference proceedingChapter (peer-reviewed)peer-review

Original languageEnglish (US)
Title of host publicationAdvances in multiphysics simulation of MEMS and NEMS
EditorsN. Aluru, C. Cercignani, A. Frangi, S. Mukherjee
PublisherImperial College Press
Pages329-374
StatePublished - 2008

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