Reactive magnetron sputtering of thin-film superconductor YBa 2Cu3O7-x

K. Char, A. D. Kent, A. Kapitulnik, M. R. Beasley, T. H. Geballe

    Research output: Contribution to journalArticlepeer-review


    Superconducting thin films of YBa2Cu3O7-x have been successfully made by co-sputtering from the three targets in an Ar and O2 mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×10 5 A/cm2 at 78 K and 2×106 A/cm 2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.

    Original languageEnglish (US)
    Pages (from-to)1370-1372
    Number of pages3
    JournalApplied Physics Letters
    Issue number17
    StatePublished - 1987

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)


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