Reactive magnetron sputtering of thin-film superconductor YBa 2Cu3O7-x

K. Char; A. D. Kent; A. Kapitulnik; M. R. Beasley; T. H. Geballe

doi:10.1063/1.98682

Reactive magnetron sputtering of thin-film superconductor YBa ₂Cu₃O_7-x

K. Char, A. D. Kent, A. Kapitulnik, M. R. Beasley, T. H. Geballe

Research output: Contribution to journal › Article › peer-review

Abstract

Superconducting thin films of YBa₂Cu₃O_7-x have been successfully made by co-sputtering from the three targets in an Ar and O₂ mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×10 ⁵ A/cm² at 78 K and 2×10⁶ A/cm ² at 4.2 K. Highly oriented thin films have been obtained on SrTiO₃ {100} substrates.

Original language	English (US)
Pages (from-to)	1370-1372
Number of pages	3
Journal	Applied Physics Letters
Volume	51
Issue number	17
DOIs	https://doi.org/10.1063/1.98682
State	Published - 1987

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Reactive magnetron sputtering of thin-film superconductor YBa 2Cu3O7-x",

abstract = "Superconducting thin films of YBa2Cu3O7-x have been successfully made by co-sputtering from the three targets in an Ar and O2 mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×10 5 A/cm2 at 78 K and 2×106 A/cm 2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.",

author = "K. Char and Kent, {A. D.} and A. Kapitulnik and Beasley, {M. R.} and Geballe, {T. H.}",

year = "1987",

doi = "10.1063/1.98682",

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volume = "51",

pages = "1370--1372",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics Publising LLC",

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T1 - Reactive magnetron sputtering of thin-film superconductor YBa 2Cu3O7-x

AU - Char, K.

AU - Kent, A. D.

AU - Kapitulnik, A.

AU - Beasley, M. R.

AU - Geballe, T. H.

PY - 1987

Y1 - 1987

N2 - Superconducting thin films of YBa2Cu3O7-x have been successfully made by co-sputtering from the three targets in an Ar and O2 mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×10 5 A/cm2 at 78 K and 2×106 A/cm 2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.

AB - Superconducting thin films of YBa2Cu3O7-x have been successfully made by co-sputtering from the three targets in an Ar and O2 mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×10 5 A/cm2 at 78 K and 2×106 A/cm 2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.

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Reactive magnetron sputtering of thin-film superconductor YBa ₂Cu₃O_7-x

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