Real-time, in situ monitoring of semiconductor processing

Richard A. Gottscho; Eray S. Aydil; Konstantinos P. Giapis; Jeffrey A. Gregus; Euijoon Yoon; Todd R. Hayes; Matthew F. Vernon; U. K. Chakrabarti

doi:10.1109/LEOS.1992.693817

Real-time, in situ monitoring of semiconductor processing

Richard A. Gottscho, Eray S. Aydil, Konstantinos P. Giapis, Jeffrey A. Gregus, Euijoon Yoon, Todd R. Hayes, Matthew F. Vernon, U. K. Chakrabarti

Chemical and Biomolecular Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	7-8
Number of pages	2
ISBN (Electronic)	0780305264
DOIs	https://doi.org/10.1109/LEOS.1992.693817
State	Published - 1992
Event	1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992 - Boston, United States Duration: Nov 16 1992 → Nov 19 1992

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	1992-November
ISSN (Print)	1092-8081

Conference

Conference	1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992
Country/Territory	United States
City	Boston
Period	11/16/92 → 11/19/92

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/LEOS.1992.693817

Cite this

Gottscho, R. A., Aydil, E. S., Giapis, K. P., Gregus, J. A., Yoon, E., Hayes, T. R., Vernon, M. F., & Chakrabarti, U. K. (1992). Real-time, in situ monitoring of semiconductor processing. In LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting (pp. 7-8). Article 693817 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 1992-November). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/LEOS.1992.693817

Real-time, in situ monitoring of semiconductor processing. / Gottscho, Richard A.; Aydil, Eray S.; Giapis, Konstantinos P. et al.
LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting. Institute of Electrical and Electronics Engineers Inc., 1992. p. 7-8 693817 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 1992-November).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gottscho, RA, Aydil, ES, Giapis, KP, Gregus, JA, Yoon, E, Hayes, TR, Vernon, MF & Chakrabarti, UK 1992, Real-time, in situ monitoring of semiconductor processing. in LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting., 693817, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 1992-November, Institute of Electrical and Electronics Engineers Inc., pp. 7-8, 1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992, Boston, United States, 11/16/92. https://doi.org/10.1109/LEOS.1992.693817

Gottscho RA, Aydil ES, Giapis KP, Gregus JA, Yoon E, Hayes TR et al. Real-time, in situ monitoring of semiconductor processing. In LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting. Institute of Electrical and Electronics Engineers Inc. 1992. p. 7-8. 693817. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS). doi: 10.1109/LEOS.1992.693817

Gottscho, Richard A. ; Aydil, Eray S. ; Giapis, Konstantinos P. et al. / Real-time, in situ monitoring of semiconductor processing. LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting. Institute of Electrical and Electronics Engineers Inc., 1992. pp. 7-8 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

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title = "Real-time, in situ monitoring of semiconductor processing",

author = "Gottscho, {Richard A.} and Aydil, {Eray S.} and Giapis, {Konstantinos P.} and Gregus, {Jeffrey A.} and Euijoon Yoon and Hayes, {Todd R.} and Vernon, {Matthew F.} and Chakrabarti, {U. K.}",

year = "1992",

doi = "10.1109/LEOS.1992.693817",

language = "English (US)",

series = "Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting",

note = "1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992 ; Conference date: 16-11-1992 Through 19-11-1992",

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AU - Aydil, Eray S.

AU - Giapis, Konstantinos P.

AU - Gregus, Jeffrey A.

AU - Yoon, Euijoon

AU - Hayes, Todd R.

AU - Vernon, Matthew F.

AU - Chakrabarti, U. K.

PY - 1992

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M3 - Conference contribution

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T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

SP - 7

EP - 8

BT - LEOS 1992 - Conference Proceedings, IEEE Lasers and Electro-Optics Society Annual Meeting

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 1992 Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 1992

Y2 - 16 November 1992 through 19 November 1992

ER -

Real-time, in situ monitoring of semiconductor processing

Publication series

Conference

ASJC Scopus subject areas

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