Fingerprint
Dive into the research topics of 'Real time in situ monitoring of surfaces during glow discharge processing: NH3 and H2 plasma passivation of GaAs'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Real time in situ monitoring of surfaces during glow discharge processing: NH3 and H2 plasma passivation of GaAs
Eray S. Aydil, Zhen H. Zhou, Richard A. Gottscho, Yves J. Chabal
Research output: Contribution to journal › Article › peer-review