Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force

R. C. Batra, M. Porfiri, D. Spinello

Research output: Contribution to journalArticlepeer-review

Abstract

We consider the von Kármán nonlinearity and the Casimir force to develop reduced-order models for prestressed clamped rectangular and circular electrostatically actuated microplates. Reduced-order models are derived by taking flexural vibration mode shapes as basis functions for the transverse displacement. The in-plane displacement vector is decomposed as the sum of displacements for irrotational and isochoric waves in a two-dimensional medium. Each of these two displacement vector fields satisfies an eigenvalue problem analogous to that of transverse vibrations of a linear elastic membrane. Basis functions for the transverse and the in-plane displacements are related by using the nonlinear equation governing the plate in-plane motion. The reduced-order model is derived from the equation yielding the transverse deflection of a point. For static deformations of a plate, the pull-in parameters are found by using the displacement iteration pull-in extraction method. Reduced-order models are also used to study linear vibrations about a predeformed configuration. It is found that 9 basis functions for a rectangular plate give a converged solution, while 3 basis functions give pull-in parameters with an error of at most 4%. For a circular plate, 3 basis functions give a converged solution while the pull-in parameters computed with 2 basis functions have an error of at most 3%. The value of the Casimir force at the onset of pull-in instability is used to compute device size that can be safely fabricated.

Original languageEnglish (US)
Pages (from-to)3558-3583
Number of pages26
JournalInternational Journal of Solids and Structures
Volume45
Issue number11-12
DOIs
StatePublished - Jun 15 2008

Keywords

  • Casimir force
  • Clamped microelectromechanical plates
  • Frequencies
  • Reduced-order nonlinear models
  • von Kármán nonlinearity

ASJC Scopus subject areas

  • Modeling and Simulation
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Applied Mathematics

Fingerprint Dive into the research topics of 'Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force'. Together they form a unique fingerprint.

Cite this