Reliability-based optimisation of chemical vapour deposition process

Keyphrases

• Reliability-based Design Optimization 100%
• Parameter Condition 50%
• Compositional Uniformity 50%
• Depositional System 50%
• Large-area Films 50%
• Performance Measure Approach 50%
• Film Thickness Uniformity 50%
• Deposition Uniformity 50%

Chemical Engineering

• Vapor Deposition 100%
• Chemical Vapor Deposition 100%
• Silane 33%
• Deposition Rate 33%

Engineering

• Deposition System 33%
• Response Surface Method 33%
• Deposition Rate 33%