Robust H controller-design for an electrostatic micro-actuator with squeezed gas film damping effects

Marialena Vagia, Anthony Tzes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this article the modeling and control design aspects of an electrostatic microactuator (EmA) with squeezed thin film damping effects are presented. The modeling analysis of the squeezed film damping effect is investigated in the case of an EmA composed by a set of two plates. The bottom plate is clamped to the ground, while the moving plate is driven by an electrically induced force which is opposed by the force exerted by a spring element. The nonlinear model of the EmA is linearized in multiple operating points with respect to the plates' displacement. A robust H-controller relying on LMI-theory is designed for the set of the resulting multiple operating models. The resulting controller stabilizes the set of linearized systems at the operating points. Particular attention is paid in order to examine the stability issue within the intervals of the operating points. Simulation results investigate the efficacy of the suggested modeling and control techniques.

Original languageEnglish (US)
Title of host publication2009 European Control Conference, ECC 2009
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2881-2886
Number of pages6
ISBN (Electronic)9783952417393
StatePublished - Mar 26 2014
Event2009 10th European Control Conference, ECC 2009 - Budapest, Hungary
Duration: Aug 23 2009Aug 26 2009

Publication series

Name2009 European Control Conference, ECC 2009

Other

Other2009 10th European Control Conference, ECC 2009
CountryHungary
CityBudapest
Period8/23/098/26/09

ASJC Scopus subject areas

  • Control and Systems Engineering

Fingerprint Dive into the research topics of 'Robust H<sub>∞</sub> controller-design for an electrostatic micro-actuator with squeezed gas film damping effects'. Together they form a unique fingerprint.

Cite this